polished wafer Specifications
| Thickness(µm) | TTV(µm) | TIR(µm) | BOW(µm) | WARP(µm) | LLS(ea) | ||
| FZ-Si-polished wafer | Single side polished wafer | 150-1500 | ≤5 | ≤5 | ≤20 | ≤20 | <10@0.3μm |
| Double sides polished wafer | 150-1500 | ≤5 | ≤5 | ≤20 | ≤20 | <10@0.3μm | |
| CZ-Si-polished wafer | Single side polished wafer | 150-1500 | ≤5 | ≤5 | ≤20 | ≤20 | <10@0.3μm |
| Double sides polished wafer | 150-1500 | ≤5 | ≤5 | ≤20 | ≤20 | <10@0.3μm | |
Note:If customer has any special requirements on geometrical parameters, we can process accordingly.